rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Process engineering analysis in semiconductor device fabrication
  name:
    name part: Middleman, Stanley
    role:
      role term: creator
  name:
    name part: Hochberg, Arthur K.
  type of resource: text
  origin info:
    place:
      place term: us
    place:
      place term: New York
    publisher: McGraw - Hill
    date issued: 1993
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xvii, 774 p. fig., tab. 23 cm
  table of contents: Includes references . - index
  note: Stanley Middleman, Arthur K. Hochberg
  subject:
    topic: Ηλεκτρονικά
  classification: 92-16442
  related item:
    title info:
      title: McGraw - Hill chemical engineering series
  related item:
    name:
      name part: McGraw-Hill chemical engineering series
  identifier: 0071127445
  location:
    physical location: GR-PaULI ΠΑΤΡΑ ΦΥΣΙΚΟ
  record info:
    record content source: GR-PaULI
    record creation date: 960327
    record change date: 20210117205927.0
    record identifier: 10025960