rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Analysis and design principles of MEMS devices
  name:
    name part: Bao, Min-Hang
    role:
      role term: creator
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  origin info:
    place:
      place term: Amsterdam
    place:
      place term: Boston
    place:
      place term: London
    publisher: Elsevier
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    form: electronic resource
    extent: xii, 312 σ. εικ. 25 εκ
  abstract: Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book
  table of contents: Chapter 1. Introduction to MEMS devices -- -- Chapter 2. Basic mechanics of beam and diaphragm structures -- -- Chapter 3. Air Damping -- -- Chapter 4. Electrostatic Actuation -- -- Chapter 5. Capacitive Sensing and Effects of Electrical Excitation -- -- Chapter 6. Piezoresistive Sensing
  note: by Minhang Bao
  note: Περιέχει βιβλιογραφικές παραπομπές και ευρετήριο
  subject:
    topic: Μικροηλεκτρονική
  classification: TK7875 .B36 2005eb
  classification: 621.381
  identifier: 9780444516169
  identifier: 0444516166
  identifier: http://www.sciencedirect.com/science/book/9780444516169
  identifier: http://www.engineeringvillage.com/controller/servlet/OpenURL
  location:
    physical location: GR-PaULI ΠΑΤΡΑ ΒΚΠ
  record info:
    record content source: GR-PaULI
    record creation date: 090520
    record change date: 20210202092020.0
    record identifier: 10074869