Electron Kinetics and Applications of Glow Discharges

• Corporate Author: SpringerLink (Online service)
• Other Authors: Kortshagen, Uwe (Editor), Tsendin, Lev D. (Editor)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 1998.
• Series: NATO Science Series: B, Advanced Science Institutes Series, 367
• Subjects: Physics.; Nuclear physics.; Heavy ions.; Hadrons.; Nuclear Physics, Heavy Ions, Hadrons.

This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to re...