rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Electroceramic-Based MEMS
    sub title: Fabrication-Technology and Applications
  name:
    name part: Setter, Nava.
    role:
      role term: editor.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  origin info:
    place:
      place term: xxu
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: electronic resource
    reformatting quality: access
    form: remote
    extent: XII, 414 p. online resource.
  abstract: The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.
  table of contents: Applications and Devices -- MEMS-Based Thin Film and Resonant Chemical Sensors -- Microactuators Based on Thin Films -- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films -- Thick-Film Piezoelectric and Magnetostrictive Devices -- Micromachined Infrared Detectors Based on Pyroelectric Thin Films -- RF Bulk Acoustic Wave Resonators and Filters -- High Frequency Tuneable Devices Based on Thin Ferroelectric Films -- MEMS for Optical Functionality -- Materials, Fabrication-Technology, and Functionality -- Ceramic Thick Films for MEMS -- Thin Film Piezoelectrics for MEMS -- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices -- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics -- Microfabrication of Piezoelectric MEMS -- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics -- Low-Cost Patterning of Ceramic Thin Films.
  note: edited by Nava Setter.
  subject:
    topic: Materials science
  subject:
    topic: Electronics
  subject:
    topic: Microelectronics
  subject:
    topic: Optical materials
  subject:
    topic: Electronic materials
  subject:
    topic: Nanotechnology
  subject:
    topic: Materials Science
  subject:
    topic: Nanotechnology
  subject:
    topic: Ceramics, Glass, Composites, Natural Methods
  subject:
    topic: Optical and Electronic Materials
  subject:
    topic: Electronics and Microelectronics, Instrumentation
  subject:
    topic: Characterization and Evaluation of Materials
  classification: T174.7
  classification: TA418.9.N35
  classification: 620.115
  related item:
    title info:
      title: Springer eBooks
  related item:
    title info:
      title: Electronic Materials: Science and Technology, 9
  identifier: 9780387233192
  identifier: http://dx.doi.org/10.1007/b101200
  record info:
    record creation date: 100301
    record change date: 20151204171129.0
    record identifier: 978-0-387-23319-2