http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Design and Modeling of Inductors, Capacitors and Coplanar Waveguides at Tens of GHz Frequencies
XI, 81 p. 70 illus., 38 illus. in color. online resource.
This book describes the basic principles of designing and modelling inductors, MIM capacitors and coplanar waveguides at frequencies of several tens of GHz. The author explains the design and modelling of key, passive elements, such as capacitors, inductors and transmission lines that enable high frequency MEMS operating at frequencies in the orders of tens of GHz.
Introduction -- RF MEMS Process of Fraunhofer ISiT -- Designing Inductors -- Modeling the Coplanar Line -- DC-Block Modeling -- Design-Kit Programming -- Summary.
SpringerBriefs in Electrical and Computer Engineering