Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact /

• Main Authors: Claeys, Cor (Author, http://id.loc.gov/vocabulary/relators/aut), Simoen, Eddy (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: Springer Series in Materials Science, 270
• Subjects: Optical materials.; Electronic materials.; Microwaves.; Optical engineering.; Semiconductors.; Electronic circuits.; Materials science.; Optical and Electronic Materials.; Microwaves, RF and Optical Engineering.; Electronic Circuits and Devices.; Characterization and Evaluation of Materials.

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

Table of Contents:

• Preface
• Introduction
• Basic Properties of Metals in Semiconductors
• Sources of Metals in Si and Ge Processing
• Characterization and Detection of Metals in Silicon and Germanium
• Electrical Activity of Metals in Si and Ge
• Impact of Metals on Silicon Devices and Circuits
• Gettering and Passivation of Metals in Silicon and Germanium
• Modeling and Simulation of Metals in Silicon and Germanium
• Conclusions.