http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
High-Resolution X-Ray Scattering from Thin Films and Multilayers
This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.
Basic elements of the equipment -- Diffractometers and reflectometers -- Scans and resolution in angular and reciprocal space -- Basic principles -- Kinematical scattering theory -- Dynamical scattering theory -- Layer thicknesses of single layers and multilayers -- Lattice parameters and lattice strains in single expitaxial layers -- Volume defects in layers -- X-ray reflection by rough multilayers -- X-ray scattering by gratings and dots -- A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal.
by Vaclav Holy, Ullrich Pietsch, Tilo Baumbach.
Optics, Lasers, Photonics, Optical Devices