rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Silicon Anodization as a Structuring Technique
    sub title: Literature Review, Modeling and Experiments
  name:
    name part: Ivanov, Alexey.
    role:
      role term: creator
    role:
      role term: author.
    role:
      role term: aut
    role:
      role term: http://id.loc.gov/vocabulary/relators/aut
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  origin info:
    place:
      place term: gw
    date issued: 2018
    edition: 1st ed. 2018.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: electronic resource
    reformatting quality: access
    form: remote
    extent: XXIX, 316 p. 141 illus., 3 illus. in color. online resource.
  abstract: Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
  table of contents: Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
  note: by Alexey Ivanov.
  subject:
    topic: Nanotechnology
  subject:
    topic: Applied mathematics
  subject:
    topic: Engineering mathematics
  subject:
    topic: Thermodynamics
  subject:
    topic: Heat engineering
  subject:
    topic: Heat transfer
  subject:
    topic: Mass transfer
  subject:
    topic: Nanotechnology and Microengineering
  subject:
    topic: Mathematical and Computational Engineering
  subject:
    topic: Engineering Thermodynamics, Heat and Mass Transfer
  classification: T174.7
  classification: 620.5
  related item:
    title info:
      title: Springer eBooks
  identifier: 9783658192389
  identifier: https://doi.org/10.1007/978-3-658-19238-9
  record info:
    record creation date: 170911
    record change date: 20191029011751.0
    record identifier: 978-3-658-19238-9