rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
  name:
    name part: Zhang, Xiao-Sheng.
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  origin info:
    place:
      place term: gw
    date issued: 2016
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: electronic resource
    reformatting quality: access
    form: remote
    extent: XX, 122 p. 95 illus., 76 illus. in color. online resource.
  abstract: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
  note: by Xiao-Sheng Zhang.
  subject:
    topic: Engineering
  subject:
    topic: Energy harvesting
  subject:
    topic: Biotechnology
  subject:
    topic: Nanotechnology
  subject:
    topic: Electronics
  subject:
    topic: Microelectronics
  subject:
    topic: Engineering
  subject:
    topic: Nanotechnology and Microengineering
  subject:
    topic: Microengineering
  subject:
    topic: Energy Harvesting
  subject:
    topic: Electronics and Microelectronics, Instrumentation
  subject:
    topic: Nanotechnology
  classification: T174.7
  classification: 620.5
  related item:
    title info:
      title: Springer eBooks
  related item:
    title info:
      title: Springer Theses, Recognizing Outstanding Ph.D. Research
  identifier: 9783662488164
  identifier: http://dx.doi.org/10.1007/978-3-662-48816-4
  record info:
    record creation date: 151201
    record change date: 20170519022345.0
    record identifier: 978-3-662-48816-4