rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Micro Electro Mechanical Systems
  name:
    name part: Huang, Qing-An.
    role:
      role term: editor.
    role:
      role term: edt
    role:
      role term: http://id.loc.gov/vocabulary/relators/edt
  name:
    name part: SpringerLink (Online service)
  type of resource: text
  origin info:
    place:
      place term: si
    date issued: 2018
    edition: 1st ed. 2018.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: electronic
    form: electronic resource
    reformatting quality: access
    form: remote
    extent: 1122 illus., 876 illus. in color. eReference. online resource.
  abstract: This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, postgraduates, researchers, scientists, and field experts. This comprehensive summary will provide a solid knowledge background and inspire innovations in this highly interdisciplinary field. The handbook series consists of 5 volumes: Micro/nano fabrication technology, MEMS, Nanomaterial, Nanomedicine and Applications of micro-/nanotechnologies in IT. Experienced researchers and experts are invited to contribute in each of these areas.The series is published under Springer Major Reference works, which allows continuous online update and publication. These features allow newcomers and other readers to keep in touch with the most up-to-date information in micro-/nanotechnologies.It presents an overview of the knowledge base, as well as selected topics and provides comprehensive and authoritative information on the field for researchers, engineers, scientists and graduate students who are involved in different aspects of micro-/nanotechnologies.This publication will provide inspiration for innovative research and application ideas for continued growth of the field.
  table of contents: Device Physics -- Scaling effect -- Sensors -- Actuators -- RF MEMS -- Micro fluid and bio MEMS -- Integration techniques -- Micro systems.
  note: edited by Qing-An Huang.
  subject:
    topic: Mechatronics
  subject:
    topic: Nanotechnology
  subject:
    topic: Electronics
  subject:
    topic: Microelectronics
  subject:
    topic: Microwaves
  subject:
    topic: Optical engineering
  subject:
    topic: Mechatronics
  subject:
    topic: Nanotechnology and Microengineering
  subject:
    topic: Electronics and Microelectronics, Instrumentation
  subject:
    topic: Microwaves, RF and Optical Engineering
  classification: TJ163.12
  classification: 629.8
  related item:
    title info:
      title: Springer Nature eReference
  related item:
    title info:
      title: Micro/Nano Technologies
  identifier: 9789811059452
  identifier: https://doi.org/10.1007/978-981-10-5945-2
  record info:
    record creation date: 180419
    record change date: 20191028212531.0
    record identifier: 978-981-10-5945-2