rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Transmission electron microscopy in micro-nanoelectronics
  name:
    name part: Claverie, A. (Alain)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: enk
    date issued: 2013
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (259 pages).
  abstract: Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission electron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs. This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face.
  table of contents: Active Dopant Profiling in the TEM by Off-Axis Electron Holography / David Cooper -- Dopant Distribution Quantitative Analysis Using STEM-EELS/EDX Spectroscopy Techniques / Roland Pantel, Germain Servanton -- Quantitative Strain Measurement in Advanced Devices: A Comparison Between Convergent Beam Electron Diffraction and Nanobeam Diffraction / Laurent Clement, Dominique Delille -- Dark-Field Electron Holography for Strain Mapping / Martin Hytch [and others] -- Magnetic mapping using electron holography / Etienne Snoeck, Christophe Gatel -- Interdiffusion and chemical reaction at interfaces by TEM/EELS / Sylvie Schamm-Chardon -- Characterization of process-induced defects / Nikolay Cherkashin, Alain Claverie -- In situ characterization methods in transmission electron microscopy / Aurelein Massebouef -- Specimen preparation for semiconductor analysis / David Cooper, Gerard Ben Assayag.
  note: edited by Alain Claverie.
  note: Includes bibliographical references and index.
  subject:
    topic: Transmission electron microscopy
  subject:
    topic: Semiconductors
  subject:
    topic: Micro-nanoelectronics
  subject:
    topic: Nanoparticles
  subject:
    topic: Nanotechnology
  subject:
    topic: Transmission electron microscopy
  subject:
    topic: Nanoelectronics
    topic: Microscopy
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: Semiconductors
  subject:
    topic: Transmission electron microscopy
  subject:
    topic: Transmission electron microscopy
  subject:
    topic: Nanoelectronics / Microscopy
  classification: QC611 .C384 2013
  classification: 621.38152
  related item:
    title info:
      title: Transmission Electron Microscopy in Micro-nanoelectronics
    name:
      name part: Claverie, Alain.
    origin info:
      publisher: London : Wiley, ©2013
  related item:
    title info:
      title: ISTE
  identifier: 9781118579022
  identifier: 111857902X
  identifier: 9781118579039
  identifier: 1118579038
  identifier: 9781118579053
  identifier: 1118579054
  identifier: 1848213670
  identifier: 9781848213678
  identifier: CL0500000277 Safari Books Online
  identifier: https://doi.org/10.1002/9781118579022
  record info:
    record content source: EBLCP
    record creation date: 130211
    record change date: 20170124071033.4
    record identifier: ocn827208448
    language of cataloging:
      language term: eng