rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemistry in microelectronics
  name:
    name part: Le Tiec, Yannick.
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: enk
    date issued: 2013
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (384 pages).
  table of contents: Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec -- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis -- The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter -- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti -- Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.
  note: edited by Yannick Le Tiec.
  subject:
    topic: Microelectronics
  subject:
    topic: Chemistry
  subject:
    topic: Chemistry
  subject:
    topic: Microelectronics
  classification: TK7874 .C446 2013
  classification: 621.381
  related item:
    title info:
      title: Electronics engineering series
  identifier: 9781848214361
  identifier: 1848214367
  identifier: 9781299277304
  identifier: 1299277306
  identifier: 9781118578070
  identifier: 1118578074
  identifier: 458980 MIL
  identifier: https://doi.org/10.1002/9781118578070
  record info:
    record content source: CDX
    record creation date: 130222
    record change date: 20170124070455.9
    record identifier: ocn830512261
    language of cataloging:
      language term: eng