http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Chemistry in the "Front end of the line" (FEOL) / François Martin, Jean-Michel Hartmann, Véronique Carron, Yannick Le Tiec -- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean, Didier Louis -- The chemistry of wet surface preparation / Yannick Le Tiec, Martin Knotter -- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne, Patrick Valenti -- Surface functionalization for micro- and nanosystems / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues, Francoise Vinet.