APA (7th ed.) Citation

Glocker, D. A., & Shah, S. I. (1995). Handbook of thin film process technology. Institute of Physics Pub..

Chicago Style (17th ed.) Citation

Glocker, David A., and S. Ismat Shah. Handbook of Thin Film Process Technology. Bristol, UK ; Philadelphia: Institute of Physics Pub., 1995.

MLA (8th ed.) Citation

Glocker, David A., and S. Ismat Shah. Handbook of Thin Film Process Technology. Institute of Physics Pub., 1995.