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| LEADER |
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10039955 |
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|a 621.3
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| 245 |
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|a IEEE transactions on semiconductor manufacturing
|h [Περιοδικό]
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| 260 |
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|b Institute of Electrical and Electronics Engineers
|c 2001
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| 310 |
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|a Τριμηνιαίο
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| 362 |
0 |
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|a 14(2001)-
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| 852 |
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| 866 |
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|a Vol.14:No.1(2001:MAR)-Vol.18:No.4(2005:DEC)
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| 942 |
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| 998 |
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