Ion implantation basics to device fabrication

• Main Author: Rimini, Emanuele
• Format: Book
• Language: English
• Published: Boston Kluwer Academic Publishers 1995
• Series: The Kluwer international series in engineering and computer science
• Subjects: Κρυσταλλολυχνίες
• Physical Description: xii, 393 p. fig. 24 cm.
• Bibliography: Includes references and index
• ISBN: 0792395204