APA (7th ed.) Citation

Middleman, S., & Hochberg, A. K. (1993). Process engineering analysis in semiconductor device fabrication. McGraw - Hill.

Chicago Style (17th ed.) Citation

Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. New York: McGraw - Hill, 1993.

MLA (8th ed.) Citation

Middleman, Stanley, and Arthur K. Hochberg. Process Engineering Analysis in Semiconductor Device Fabrication. McGraw - Hill, 1993.