Modeling and simulation of thin-film processing Proceedings of the Materials Research Society Symposium on "Modeling and...", held in San Francisco, CA, from April 17-20, 1995
Other Authors: | , , , |
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Format: | Book |
Language: | English |
Published: |
Pittsburgh
Materials Research Society
1995
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Series: | Materials Research Society Symposium Proceedings
v.389 |
Subjects: |
Physical Description: | xi, 382 p. fig., tab. 23,5 cm |
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ISBN: | 1558992928 |
ISSN: | 0272-9172 |