Modeling and simulation of thin-film processing Proceedings of the Materials Research Society Symposium on "Modeling and...", held in San Francisco, CA, from April 17-20, 1995
| Other Authors: | , , , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Pittsburgh
Materials Research Society
1995
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| Series: | Materials Research Society Symposium Proceedings
v.389 |
| Subjects: |
Table of Contents:
- Includes references . - index