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04192cam a2200793Ma 4500 |
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ocm43475625 |
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20190114101347.0 |
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|a MAIN
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|a Database needs for modeling and simulation of plasma processing /
|c Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
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260 |
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|a Washington, D.C. :
|b National Academy Press,
|c 1996.
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|a 1 online resource (64 pages).
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336 |
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|a text
|b txt
|2 rdacontent
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|a computer
|b c
|2 rdamedia
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|a online resource
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|a Includes bibliographical references.
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|a Print version record.
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|b All EBSCO eBooks
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650 |
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0 |
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|v Congresses.
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650 |
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0 |
|a Plasma engineering
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650 |
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0 |
|a Plasma engineering
|x Computer simulation
|v Congresses.
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650 |
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6 |
|a Semiconducteurs
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6 |
|a Plasmas, Technique des
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|a Semiconducteurs
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|a Plasma engineering
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650 |
|
7 |
|a Plasma engineering
|x Computer simulation.
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650 |
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7 |
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653 |
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|a Andre fag (naturvidenskab og teknik)
|a Andre fag.
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655 |
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4 |
|a Electronic books.
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655 |
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7 |
|a Conference papers and proceedings.
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710 |
2 |
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|a National Research Council (U.S.).
|b Panel on Database Needs in Plasma Processing.
|
776 |
0 |
8 |
|i Print version:
|t Database needs for modeling and simulation of plasma processing.
|d Washington, D.C. : National Academy Press, 1996
|z 0309055911
|w (DLC) 96070732
|w (OCoLC)36176538
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