Database needs for modeling and simulation of plasma processing /

• Corporate Author: National Research Council (U.S.). Panel on Database Needs in Plasma Processing
• Format: eBook
• Language: English
• Published: Washington, D.C. : National Academy Press, 1996.
• Series: Compass series (Washington, D.C.)
• Subjects: Semiconductors > Design and construction > Congresses.; Plasma engineering > Databases > Congresses.; Plasma engineering > Computer simulation > Congresses.; Semiconducteurs > Conception et construction > Congr�es.; Plasmas, Technique des > Bases de donn�ees > Congr�es.; Plasmas, Technique des > Simulation par ordinateur > Congr�es.; SCIENCE > Physics > Electricity.; Plasma engineering > Computer simulation.; Semiconducteurs > Conception et construction.; Plasmas, Technique des > Bases de donnees.; Plasmas, Technique des > Simulation par ordinateur.; Semiconductors > Design and construction.; Plasma engineering > Databases.; Andre fag (naturvidenskab og teknik) > Andre fag.; Electronic books.; Conference papers and proceedings.