Mechanical microsensors

• Main Author: Elwenspoek, M 1948- ((Miko))
• Other Authors: Wiegerink, Remco J. 1964-
• Format: Book
• Language: English
• Published: Berlin Springer c2001
• Series: Microtechnology and MEMS
• Subjects: Αισθητήρες; Ηλεκτρονικά κυκλώματα; Τεχνολογία αισθητήρων
• Physical Description: x, 295 p. fig., tab. 24 cm.
• Bibliography: Includes bibliographical references and index
• ISBN: 3540675825