Piezoelectric Multilayer Beam Bending Actuators Static and Dynamic Behavior and Aspects of Sensor Integration

Bibliographic Details
Main Author: Ballas, Rodiger G.
Format: Electronic Kit Book
Language:English
Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2007
Series:Microtechnology and Mems
Subjects:
Online Access:http://dx.doi.org/10.1007/978-3-540-32642-7

Internet

http://dx.doi.org/10.1007/978-3-540-32642-7

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