Fast Simulation of Electro-Thermal MEMS Efficient Dynamic Compact Models

• Main Author: Bechtold, Tamara
• Other Authors: Rudnyi, Evgenii B., Korvink, Jan G.
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2007
• Subjects: Engineering; Electronics; Systems engineering; Mechanics; Electronics and Microelectronics, Instrumentation; Physics and Applied Physics in Engineering; Circuits and Systems