CMOS Hotplate Chemical Microsensors

CMOS Hotplate Chemical Microsensors

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Bibliographic Details
Main Author: Graf, Markus
Other Authors: Barrettino, Diego, Baltes, Henry P., Hierlemann, Andreas
Format: Electronic Kit Book
Language:English
Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2007
Series:Microtechnology and MEMS
Subjects:
Engineering
Chemistry, Physical organic
Optical materials
Physics and Applied Physics in Engineering
Physical Chemistry
Optical and Electronic Materials
Online Access:http://dx.doi.org/10.1007/978-3-540-69562-2

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