Electroceramic-Based MEMS Fabrication-Technology and Applications

• Main Author: Setter, Nava
• Format: Electronic Kit Book
• Language: English
• Published: Boston, MA Springer Science+Business Media, Inc. 2005
• Series: Electronic Materials: Science and Technology 9
• Subjects: Optical materials; Nanotechnology; Materials; Electronics; Chemistry; Optical and Electronic Materials; Characterization and Evaluation Materials; Ceramics, Glass, Composites, Natural Methods; Electronics and Microelectronics, Instrumentation