Electroceramic-Based MEMS Fabrication-Technology and Applications

Electroceramic-Based MEMS Fabrication-Technology and Applications

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Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας:	Setter, Nava
Μορφή:	Ηλεκτρονική πηγή Εργαλειοθήκη Βιβλίο
Γλώσσα:	English
Έκδοση:	Boston, MA Springer Science+Business Media, Inc. 2005
Σειρά:	Electronic Materials: Science and Technology 9
Θέματα:	Optical materials Nanotechnology Materials Electronics Chemistry Optical and Electronic Materials Characterization and Evaluation Materials Ceramics, Glass, Composites, Natural Methods Electronics and Microelectronics, Instrumentation
Διαθέσιμο Online:	http://dx.doi.org/10.1007/b101200

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