Principles and Applications of NanoMEMS Physics
| Main Author: | |
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| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
Boston, MA
Springer
2005
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| Series: | Microsystems
15 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/b136228 |
| Physical Description: | v.: digital |
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| ISBN: | 9780387258348 |
| ISSN: | 1389-2134 |