Principles and Applications of NanoMEMS Physics
| Main Author: | Santos, HΓ©ctor J. |
|---|---|
| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
Boston, MA
Springer
2005
|
| Series: | Microsystems
15 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/b136228 |
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