Force Sensors for Microelectronic Packaging Applications

• Main Author: Schwizer, JΓΌrg
• Other Authors: Mayer, Michael, Brand, Oliver
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer-Verlag Berlin Heidelberg 2005
• Series: Microtechnology and MEMS
• Subjects: Optical materials; Nanotechnology; Electronics; Engineering; System safety; Chemistry; Optical and Electronic Materials; Electronics and Microelectronics, Instrumentation; Physics and Applied Physics in Engineering; Quality Control, Reliability, Safety and Risk