Gettering Defects in Semiconductors

• Main Author: Perevoschikov, Victor A.
• Other Authors: Skoupov, Vladimir D.
• Format: Electronic Kit Book
• Language: English
• Published: Berlin, Heidelberg Springer Berlin Heidelberg 2005
• Series: Springer Series in Advanced Microelectronics 19
• Subjects: Optical materials; Chemical engineering; Chemistry; Optical and Electronic Materials; Industrial Chemistry/Chemical Engineering
• Physical Description: v.: digital
• ISBN: 9783540294993
• ISSN: 1437-0387