Gettering Defects in Semiconductors
| Main Author: | Perevoschikov, Victor A. |
|---|---|
| Other Authors: | Skoupov, Vladimir D. |
| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2005
|
| Series: | Springer Series in Advanced Microelectronics
19 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/3-540-29499-6 |
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