Gettering Defects in Semiconductors
Main Author: | Perevoschikov, Victor A. |
---|---|
Other Authors: | Skoupov, Vladimir D. |
Format: | Electronic Kit Book |
Language: | English |
Published: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2005
|
Series: | Springer Series in Advanced Microelectronics
19 |
Subjects: | |
Online Access: | http://dx.doi.org/10.1007/3-540-29499-6 |
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