Defects in High-k Gate Dielectric Stacks Nano-Electronic Semiconductor Devices
| Main Author: | Gusev, Evgeni |
|---|---|
| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
Dordrecht
Springer
2006
|
| Series: | NATO Science Series II: Mathematics, Physics and Chemistry
220 |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1007/1-4020-4367-8 |
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