Diamond films chemical vapor deposition for oriented and heteroepitaxial growth
<li>Discusses the most advanced techniques for diamond growth</li> <li>Assists diamond researchers in deciding on the most suitable process conditions</li> <li>Inspires readers to devise new CVD (chemical vapor deposition</li> Ever since the early 1980s, and the d...
Κύριος συγγραφέας: | |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Amsterdam ;
London Elsevier
2005
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Έκδοση: | 1st ed |
Θέματα: | |
Διαθέσιμο Online: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information |
Πίνακας περιεχομένων:
- 1. Overview of Oriented Growth
- 2. Diamond - Structure and CVD Growth
- 3. Microwave Plasma CVD Reactors
- 4. Other CVD Reactors
- 5. Crystal Orientations and Film Surface Morphology
- 6. Formation of Twins
- 7. Homoepitaxial Growth
- 8. Surface Reconstruction
- 9. Epitaxial Growth on cBN, Ni, and Other Substrates
- 10. Diamond Nucleation
- 11. HOD Film Growth
- 12. Oriented Growth on Noble Metals
- 13. Properties and Applications of Heteroepitaxial Diamond Films
- 14. Conclusion
- APPENDICES
- <li>Notations and units</li>
- <li>Plasma</li>
- <li>Properties of diamond and other semiconducting materials</li>
- <li>Reconstruction of diamond surfaces</li>
- <li>Materials constants</li>
- <li>Phase diagrams of carbon and metals</li>
- <li>Carbon solubilities in metals</li>
- <li>Biasing and growth conditions for diamond growth</li>