Diamond films chemical vapor deposition for oriented and heteroepitaxial growth

<li>Discusses the most advanced techniques for diamond growth</li> <li>Assists diamond researchers in deciding on the most suitable process conditions</li> <li>Inspires readers to devise new CVD (chemical vapor deposition</li> Ever since the early 1980s, and the d...

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Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Kobashi, Koji
Συγγραφή απο Οργανισμό/Αρχή: ScienceDirect (Online service)
Μορφή: Ηλεκτρονική πηγή Βιβλίο
Γλώσσα:English
Έκδοση: Amsterdam ; London Elsevier 2005
Έκδοση:1st ed
Θέματα:
Διαθέσιμο Online:An electronic book accessible through the World Wide Web; click for information
An electronic book accessible through the World Wide Web; click for information
Πίνακας περιεχομένων:
  • 1. Overview of Oriented Growth
  • 2. Diamond - Structure and CVD Growth
  • 3. Microwave Plasma CVD Reactors
  • 4. Other CVD Reactors
  • 5. Crystal Orientations and Film Surface Morphology
  • 6. Formation of Twins
  • 7. Homoepitaxial Growth
  • 8. Surface Reconstruction
  • 9. Epitaxial Growth on cBN, Ni, and Other Substrates
  • 10. Diamond Nucleation
  • 11. HOD Film Growth
  • 12. Oriented Growth on Noble Metals
  • 13. Properties and Applications of Heteroepitaxial Diamond Films
  • 14. Conclusion
  • APPENDICES
  • <li>Notations and units</li>
  • <li>Plasma</li>
  • <li>Properties of diamond and other semiconducting materials</li>
  • <li>Reconstruction of diamond surfaces</li>
  • <li>Materials constants</li>
  • <li>Phase diagrams of carbon and metals</li>
  • <li>Carbon solubilities in metals</li>
  • <li>Biasing and growth conditions for diamond growth</li>