Interlayer dielectrics for semiconductor technologies
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...
| Συγγραφή απο Οργανισμό/Αρχή: | |
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| Άλλοι συγγραφείς: | , , |
| Μορφή: | Ηλεκτρονική πηγή Βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Amsterdam Boston
Elsevier/Academic Press
2003
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| Θέματα: | |
| Διαθέσιμο Online: | An electronic book accessible through the World Wide Web; click for information An electronic book accessible through the World Wide Web; click for information |
