Interlayer dielectrics for semiconductor technologies

• Corporate Author: ScienceDirect (Online service)
• Other Authors: Murarka, S. P, Eizenberg, M ((Moshe)), Sinha, A. K ((Ashok K.))
• Format: Electronic Book
• Language: English
• Published: Amsterdam Boston Elsevier/Academic Press 2003
• Subjects: Ημιαγωγοί; Dielectrics

Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. Manipulating the materials and their properties at atomic dimensions has become a must. This book presents the case of interlayer dielectrics materials whilst considering these challe...

Table of Contents:

• Dialectric Properties, Characterization of Low Dielectric Constant Materials, Compatibilities of Dielectric Film, Silicon Based Dielectrics, Low K Polymers, Chemical Vapour Deposition of CF Low K Materials, Nanoporous Dielectric Films: Fundamental Property Relations and Microelectronic Applications, High K Dielectrics Grown by Atomic Layer Disposition, Dielectric Materials in Optical Waveguide Applications, Reliability, Future Trends in Silicon Technologies