Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

• Main Author: Gusev, Evgeni
• Corporate Author: SpringerLink (Online service)
• Other Authors: Garfunkel, Eric, Dideikin, Arthur
• Format: Electronic Kit Book
• Language: English
• Published: Dordrecht Springer Science+Business Media B.V. 2010
• Series: NATO Science for Peace and Security Series B: Physics and Biophysics
• Subjects: Chemistry; Χημικοί αντιδραστήρες; Mechanics; Mechanical engineering; Engineering; Microwaves; Μικροηλεκτρονική; Νανοτεχνολογία; Mechanical Engineering; Microwaves, RF and Optical Engineering