Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines

• Main Author: Lang, Jeffrey
• Corporate Author: SpringerLink (Online service)
• Format: Electronic Kit Book
• Language: English
• Published: Boston, MA Springer-Verlag US 2010
• Series: MEMS Reference Shelf
• Subjects: Engineering; Computer engineering; Electronics; Systems engineering; Electric engineering; Electronics and Microelectronics, Instrumentation; Energy Technology; Circuits and Systems; Electrical Engineering; Energy, general
• Physical Description: v.: digital
• ISBN: 9780387777474
• ISSN: 1936-4407