Multi-Wafer Rotating MEMS Machines Turbines, Generators, and Engines
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| Format: | Electronic Kit Book |
| Language: | English |
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Boston, MA
Springer-Verlag US
2010
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| Series: | MEMS Reference Shelf
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| Online Access: | http://dx.doi.org/10.1007/978-0-387-77747-4 |
