Mechanics and Physics of Precise Vacuum Mechanisms

• Main Author: Deulin, E. A
• Corporate Author: SpringerLink (Online service)
• Other Authors: Mikhailov, V. P, Panfilov, Yu V, Nevshupa, R. A
• Format: Electronic Kit Book
• Language: English
• Published: Dordrecht Springer Science+Business Media B.V. 2010
• Series: Fluid Mechanics and Its Applications 91
• Subjects: Engineering; Vibration; Engineering design; Chemistry, inorganic; Surfaces (Physics); Engineering Design; Engineering, general; Τριβολογία; Surfaces and Interfaces, Thin Films; Vibration, Dynamical Systems, Control