Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing
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| Format: | Electronic Kit Book |
| Language: | English |
| Published: |
London
Springer-Verlag London
2010
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| Series: | Springer Series in Advanced Manufacturing
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| Online Access: | http://dx.doi.org/10.1007/978-1-84996-254-4 |
