Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

• Main Author: Gao, Wei
• Corporate Author: SpringerLink (Online service)
• Format: Electronic Kit Book
• Language: English
• Published: London Springer-Verlag London 2010
• Series: Springer Series in Advanced Manufacturing
• Subjects: Engineering; Control engineering systems; Machinery; Nanotechnology; Manufacturing, Machines, Tools; Γεωδαισία; Control , Robotics, Mechatronics