Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

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Bibliographic Details
Main Author: Gao, Wei
Corporate Author: SpringerLink (Online service)
Format: Electronic Kit Book
Language:English
Published: London Springer-Verlag London 2010
Series:Springer Series in Advanced Manufacturing
Subjects:
Engineering
Control engineering systems
Machinery
Nanotechnology
Manufacturing, Machines, Tools
Γεωδαισία
Control , Robotics, Mechatronics
Online Access:http://dx.doi.org/10.1007/978-1-84996-254-4

Internet

http://dx.doi.org/10.1007/978-1-84996-254-4

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