APA (7th ed.) Citation

Adams, T. M., & Layton, R. A. (2010). Introductory MEMS: Fabrication and Applications (1.). Springer Science+Business Media, LLC.

Chicago Style (17th ed.) Citation

Adams, Thomas M., and Richard A. Layton. Introductory MEMS: Fabrication and Applications. 1. Boston, MA: Springer Science+Business Media, LLC, 2010.

MLA (8th ed.) Citation

Adams, Thomas M., and Richard A. Layton. Introductory MEMS: Fabrication and Applications. 1. Springer Science+Business Media, LLC, 2010.

Warning: These citations may not always be 100% accurate.