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110802s2010 eng |
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|a GR-PaULI
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|a eng
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| 100 |
1 |
|
|a Adams, Thomas M.
|9 98982
|
| 245 |
1 |
0 |
|a Introductory MEMS
|h [electronic resource]
|b Fabrication and Applications
|c by Thomas M. Adams, Richard A. Layton
|
| 250 |
|
|
|a 1
|
| 260 |
|
|
|a Boston, MA
|b Springer Science+Business Media, LLC
|c 2010
|
| 300 |
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|b v.: digital
|
| 650 |
|
4 |
|a Engineering
|9 17712
|
| 650 |
|
4 |
|a Mechanics
|9 12220
|
| 650 |
|
4 |
|a Materials
|9 13218
|
| 650 |
|
4 |
|a Electronics
|9 15695
|
| 650 |
|
4 |
|a Systems engineering
|9 64844
|
| 650 |
|
4 |
|a Surfaces (Physics)
|9 64420
|
| 650 |
|
4 |
|a Engineering
|9 17712
|
| 650 |
|
4 |
|a Electronics and Microelectronics, Instrumentation
|9 64430
|
| 650 |
|
4 |
|a Circuits and Systems
|9 24301
|
| 650 |
|
4 |
|a Mechanics
|9 12220
|
| 650 |
|
4 |
|a Surfaces and Interfaces, Thin Films
|9 64422
|
| 650 |
|
4 |
|a Continuum Mechanics and Mechanics of Materials
|9 64481
|
| 700 |
1 |
|
|a Layton, Richard A
|9 98983
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| 710 |
2 |
|
|a SpringerLink (Online service)
|9 68735
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| 852 |
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|a GR-PaULI
|b ΠΑΤΡΑ
|b ΒΚΠ
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|u http://dx.doi.org/10.1007/978-0-387-09511-0
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