Introductory MEMS Fabrication and Applications

• Main Author: Adams, Thomas M.
• Corporate Author: SpringerLink (Online service)
• Other Authors: Layton, Richard A
• Format: Electronic Kit Book
• Language: English
• Published: Boston, MA Springer Science+Business Media, LLC 2010
• Edition: 1
• Subjects: Engineering; Mechanics; Materials; Electronics; Systems engineering; Surfaces (Physics); Electronics and Microelectronics, Instrumentation; Circuits and Systems; Surfaces and Interfaces, Thin Films; Continuum Mechanics and Mechanics of Materials