Vacuum mechatronics

• Main Author: Beni, Gerardo
• Other Authors: Belinski, Steve, Hackwood, Susan
• Format: Book
• Language: English
• Published: London Artech House 1990
• Series: The Artech House materials science library
• Subjects: Μηχανική > Μηχανολογία
• Physical Description: xi, 377 p. fig., tab. 29 cm
• ISBN: 0890064563