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|a Beni, Gerardo
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|a Vacuum mechatronics
|c Steve Belinski, Gerardo Beni, Susan Hackwood...[et al.]
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|a London
|b Artech House
|c 1990
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|a xi, 377 p.
|b fig., tab.
|c 29 cm
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|a The Artech House materials science library
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|a Includes appendices, reprint acknowledgements, index
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|a Belinski, Steve
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|a The Artech House materials science library
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