Microsystem Design
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of micr...
| Κύριος συγγραφέας: | |
|---|---|
| Συγγραφή απο Οργανισμό/Αρχή: | |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Boston, MA :
Springer US,
2001.
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| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Getting Started
- An Approach to Mems Design
- Microfabrication
- Process Integation
- Modeling Strategies
- Lumped Modeling with Circuit Elements
- Energy-conserving Transducers
- Lumped-element System Dynamics
- Domain-Specific Details
- Elasticity
- Structures
- Energy Methods
- Dissipation and the Thermal Energy Domain
- Lumped Modeling of Dissipative Processes
- Fluids
- Circuit and System Issues
- Electronics
- Feedback Systems
- Noise
- Case Studies
- Packaging
- A Piezoresistive Pressure Sensor
- A Capacitive Accelerometer
- Electrostatic Projection Displays
- A Piezoelectric Rate Gyroscope
- Microsystems for DNA Amplification
- A Microbridge Combustible-gas Sensor.
