Introductory MEMS Fabrication and Applications /

• Main Authors: Adams, Thomas M. (Author), Layton, Richard A. (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Boston, MA : Springer US, 2010.
• Edition: 1.
• Subjects: Engineering.; Mechanics.; Continuum mechanics.; Electronics.; Microelectronics.; Electronic circuits.; Materials > Surfaces.; Thin films.; Electronics and Microelectronics, Instrumentation.; Circuits and Systems.; Surfaces and Interfaces, Thin Films.; Continuum Mechanics and Mechanics of Materials.

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...

Table of Contents:

• Fabrication
• The substrate and adding material to it
• Creating and transferring patterns#x2014;Photolithography
• Creating structures#x2014;Micromachining
• Solid mechanics
• Applications
• Thinking about modeling
• MEMS transducers#x2014;An overview of how they work
• Piezoresistive transducers
• Capacitive transducers
• Piezoelectric transducers
• Thermal transducers
• to microfluidics
• Laboratories
• Microfabrication laboratories.